Indima Yokugaya Ngokuchanekileyo yeBrown Fused Alumina Micropowder kwiShishini leSemiconductor
Zihlobo, namhlanje siza kuthetha ngento enzima nelula ukuyithetha—umgubo omncinci we-alumina oxutywe ngombala omdakaUsenokuba awuzange uve ngayo, kodwa ezona chips zibalulekileyo nezithambileyo kwifowuni yakho nakwi-smartwatch, ngaphambi kokuba zenziwe, kusenokwenzeka ukuba zaziyilungisile. Ukuyibiza ngokuba “yi-chip cosmetician eyintloko” ye-chip akusikuko ukubaxa izinto.
Musa ukuyicinga njengesixhobo esirhabaxa njengelitye eligobileyo. Kwihlabathi lee-semiconductors, idlala indima ebuthathaka njengomqophi omncinci osebenzisa ii-scalpels ezincinci.
I. "Ukukrola Ubuso" kweChip: Kutheni Ukukrola Kubalulekile?
Masiqale siqonde into enye: iitships azikhuli ngqo emhlabeni othe tyaba. "Zakhiwe" umaleko ngokulandelelana kwi-silicon wafer ecocekileyo kakhulu, ethe tyaba (esiyibiza ngokuba yi-"wafer"), njengokwakha isakhiwo. Esi "sakhiwo" sinemigangatho emininzi, kwaye ujikelezo kumgangatho ngamnye luncinci kune-1/2000 ubukhulu beenwele zomntu.
Nantsi ke ingxaki: xa wakha umgangatho omtsha, ukuba isiseko—umphezulu womgangatho wangaphambili—awulingani kangako, nokuba kukho i-protrusion encinci njenge-atom, inokubangela ukuba isakhiwo sonke sigobe, sibe mfutshane, kwaye senze iitships zingasebenzi. Ilahleko ayisiyonto yokuhlekisa.
Ngoko ke, emva kokuba umgangatho ngamnye ugqityiwe, kufuneka senze “ukucoca” kunye “nokulinganisa.” Le nkqubo inegama elihle: “Ukucwangcisa iikhemikhali,” elifinyeziweyo njenge-CMP. Nangona igama livakala liyinkimbinkimbi, lo mgaqo awunzima ukuwuqonda: ludibaniso lokugqwala kweekhemikhali kunye nokugqwala kweekhemikhali.
“Ukubhoboza” kwekhemikhali kusebenzisa ulwelo olukhethekileyo lokupholisha ukuthambisa nokugqwala izinto eziza kususwa, nto leyo eyenza zibe “thambile” ngakumbi.
"Ukubethela" koomatshini kuyaqala ukusebenza—umgubo omncinci we-corundum micropowderUmsebenzi wayo kukusebenzisa iindlela ezibonakalayo ukuze "ikhuhle" ngokuchanekileyo nangokulinganayo izinto "ezithambileyo" yinkqubo yeekhemikhali.
Ungabuza, nangona kukho izinto ezininzi zokurhawuzelela ezikhoyo, kutheni le nto ikhethekileyo? Kulapho ke iimpawu zayo ezibalaseleyo zibonakala khona.
II. “Umgubo weMicronized Ongafakwanga Kangako kwiMicronized”: Izakhono Ezikhethekileyo zeBrown Fused Alumina
Kwishishini le-semiconductor, umgubo we-alumina omdaka oxutywe ne-micronized osetyenziswayo awuyomveliso iqhelekileyo. Yiyunithi "yee-special forces", ekhethwe ngononophelo kwaye ihluzwe.
Okokuqala, kunzima ngokwaneleyo, kodwa akukubi kangako.I-alumina exutyiweyo emdakaUbulukhuni be-allumina bulandela idayimani kuphela, buyanele ukuphatha izinto ezisetyenziswa rhoqo njenge-silicon, i-silicon dioxide, kunye ne-tungsten. Kodwa eyona nto iphambili kukuba ubulukhuni bayo bubulukhuni "obuqinileyo". Ngokungafaniyo nezinye izinto eziqinileyo (ezifana nedayimani) ezibuthathaka kwaye ziqhekeka lula xa zixinzelelwe, i-alumina exutywe ngombala omdaka igcina ukuthembeka kwayo ngelixa iqinisekisa amandla okusika, iphepha ukuba "yinto etshabalalisayo."
Okwesibini, ubungakanani bayo obuncinci besuntswana buqinisekisa ukusika ngokulinganayo. Le yeyona ngongoma ibalulekileyo. Khawuthelekelele uzama ukupolisha i-jade exabisekileyo ngenqwaba yamatye anobukhulu obahlukeneyo. Amatye amakhulu aya kushiya imingxunya enzulu, ngelixa amancinci anokuba mancinci kakhulu ukuba asebenze kuwo. Kwiinkqubo ze-CMP (Chemical Mechanical Polishing), oku akwamkelekanga kwaphela. I-alumina micropowder emdaka exutywe ne-brown esetyenziswa kwi-semiconductors kufuneka ibe nokusasazwa kobukhulu besuntswana obuncinci kakhulu. Oku kuthetha ukuba phantse zonke iisuntswana zilingana ngobukhulu. Oku kuqinisekisa ukuba amawaka eesuntswana ze-micropowder zihamba ngaxeshanye kumphezulu we-wafer, zisebenzisa uxinzelelo olulinganayo ukwenza umphezulu ongenasiphako, hayi onamabala. Olu lwazi lukwinqanaba le-nanometer.
Okwesithathu, sisixhobo “esithembekileyo” ngokweekhemikhali. Ukwenziwa kweetships kusebenzisa iintlobo ngeentlobo zeekhemikhali, kuquka iindawo ezineasidi kunye ne-alkaline. I-brown fused alumina micropowder izinzile kakhulu ngokweekhemikhali kwaye ayisebenzi lula nezinye izinto ezikulwelo lokupholisha, nto leyo ethintela ukungena kokungcola okutsha. Kufana nomsebenzi okhutheleyo, ongenakratshi—uhlobo lomntu othandwa ngabaphathi (iinjineli).
Okwesine, imo yayo iyalawuleka, ivelisa amasuntswana "agudileyo". I-alumina micropowder emdaka ephucukileyo inokulawula "imilo" (okanye "imo") yamasuntswana. Ngenkqubo ekhethekileyo, amasuntswana anemiphetho ebukhali anokuguqulwa abe yimilo ephantse ibe yi-spherical okanye i-polyhedral. La masuntswana "agudileyo" anciphisa ngempumelelo impembelelo "yokugoba" kumphezulu we-wafer ngexesha lokusika, enciphisa kakhulu umngcipheko wokukrweleka.
III. Ukusetyenziswa kwehlabathi lokwenyani: "Ugqatso oluthuleyo" kuMgca woMveliso we-CMP
Kumgca wemveliso ye-CMP, ii-wafers zibanjwe ngokuqinileyo endaweni yazo ngee-vacuum chucks, zibekwe phezulu ziye ezantsi, zicinezelwe kwi-polish pad ejikelezayo. Ulwelo lokupholisha olune-brown fused alumina micropowder luhlala lutshizwa, njengenkungu encinci, phakathi kwe-polish pad kunye ne-wafer.
Kule ndawo, kuqala "ugqatso oluchanekileyo" kwihlabathi le-microscopic. Iibhiliyoni zee-alumina micropowder particles ezimdaka ezixutywe ngombala omdaka, phantsi koxinzelelo nokujikeleza, zenza izigidi zee-nanometer-level cuts ngomzuzwana kumphezulu we-wafer. Kufuneka zihambe ngaxeshanye, njengomkhosi oqeqeshwe kakuhle, ziqhubela phambili kakuhle, "zithambise" iindawo eziphakamileyo kwaye "zishiye zingenanto" iindawo ezisezantsi.
Yonke le nkqubo mayibe thambileyo njengomoya wasentwasahlobo, kungabi sisivuthuvuthu esivuthayo. Amandla agqithisileyo anokukrwela okanye enze imifantu emincinci (ebizwa ngokuba "ngumonakalo ongaphantsi komhlaba"); amandla angonelanga akhokelela ekusebenzeni okuphantsi kwaye aphazamise iishedyuli zemveliso. Ke ngoko, ulawulo oluchanekileyo malunga noxinzelelo, ubungakanani bamasuntswana, kunye nemo ye-brown fused alumina micropowder zimisela ngokuthe ngqo isivuno sokugqibela se-chip kunye nokusebenza.
Ukususela ekupolisheni kokuqala okurhabaxa kwee-wafers ze-silicon, ukuya ekuplaneni komaleko ngamnye wokukhusela (i-silicon dioxide), kwaye ekugqibeleni ukuya ekupolisheni kweeplagi ze-tungsten kunye neentambo zobhedu ezisetyenziselwa ukudibanisa iisekethe, i-brown fused alumina micropowder ibaluleke kakhulu phantse kuyo yonke inyathelo elibalulekileyo lokuplanisha. Ingena kuyo yonke inkqubo yokwenziwa kweetships, ngokwenene "liqhawe elingasemva kweqonga."
IV. Imingeni kunye nekamva: Akukho nto ilungileyo, ingcono kuphela
Kakade ke, le ndlela ayinasiphelo. Njengoko iinkqubo zokwenziwa kweetships zihambela phambili ukusuka kwi-7nm kunye ne-5nm ukuya kwi-3nm kwaye zincinci nangakumbi, iimfuno zeenkqubo ze-CMP zifikelele kwinqanaba "eligqithisileyo". Oku kuzisa imingeni emikhulu ngakumbi kwi-brown fused alumina micropowder:
Zintle kwaye ziyafana ngakumbi:Iipowder ezincinci zexesha elizayokusenokufuneka ukuba ifikelele kumashumi ee-nanometer scale, kunye nokusasazwa kobukhulu bezinto ezisetyenziswa kwi-particles ngendlela efanayo ngokungathi ihluziwe yi-laser.
Isicoci: Nakuphi na ukungcola kwee-ion zesinyithi kuyabulala, nto leyo ekhokelela kwiimfuneko zococeko oluphezulu ngakumbi.
Ukusebenza: Ngaba "ii-micropowders ezikrelekrele" ziya kuvela kwixesha elizayo? Umzekelo, ngeendawo eziguqulwe ngokukodwa, zinokutshintsha iimpawu zokusika phantsi kweemeko ezithile, okanye zifezekise ukuzilola, ukuzithambisa, okanye eminye imisebenzi?
Ngenxa yoko, nangona imvelaphi yayo kwishishini lemveli lokurhawuzelela, i-brown fused alumina micropowder iye yatshintsha kakhulu xa ingena kwicandelo lanamhlanje lee-semiconductors. Ayisekho "isando," kodwa "yi-nanosurgical scalpel." Umphezulu ogudileyo we-core chip kuzo zonke izixhobo ze-elektroniki esizisebenzisayo ubangelwa ziingceba ezincinci ezingenakubalwa.
Le yiprojekthi enkulu eyenziwe kwihlabathi le-microscopic, kwayeumgubo omncinci we-alumina oxutywe ngombala omdakangokungathandabuzekiyo yingcali ethule kodwa engenamsebenzi kweli phulo.